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In Q1'26, Onto Innovation (ONTO) achieved a total revenue of $291.95M, with the Systems and software segment continuing to be the dominant contributor at $247.16M. The Parts and Services segments contributed $26.55M and $18.24M respectively, reflecting a robust start to the fiscal year. From Q2'23 to Q1'26, the company demonstrated an overall upward growth trend, characterized by a steady rise in Systems and software revenue which peaked at $231.15M in Q1'25 before experiencing a temporary contraction in Q3'25. However, a significant recovery followed, with total revenue rebounding strongly from $218.19M in Q3'25 to the current high. The Parts and Services segments have shown relative stability and gradual expansion, supporting the core business during market fluctuations.