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In Q3'25, ONTO's revenue breakdown shows Systems and software at $173.8M, Parts at $23.9M, and Services at $20.5M, totaling $218.2M, with Systems and software continuing to dominate as the largest segment while Parts saw a notable uptick. From Q4'22 to Q3'25, Systems and software revenue fluctuated from a high of $231.2M in Q1'25 down to $173.8M in Q3'25 after peaking at $228M in Q4'24, indicating initial growth followed by a recent decline; Parts remained relatively stable around $18M-$24M with a slight increase in the latest quarter, while Services showed steady growth from $13.8M to $20.5M, underscoring its emerging contribution to overall revenue diversification in this stacked bar chart.