In the most recent period of Q2'26, KLAC's ROE stands at 20.96%, reflecting a moderate decline from the prior quarter's 22.49%, while ROA remains stable at 6.85%, and ROIC is at 10.71%, indicating sustained efficiency in capital utilization despite the slight dip in returns. Over the timeframe from Q3'23 to Q2'26, ROE has shown overall volatility with an upward trajectory, peaking at 27.18% in Q3'25 before recent softening, highlighting improved equity efficiency amid operational fluctuations. ROA and ROIC exhibit a clearer growth pattern, rising from lows of around 4.08% and 7.05% in Q2'24 to highs of 7.49% and 12.06% in Q4'25, respectively, before stabilizing, which suggests enhancing asset and invested capital productivity driven by key inflection points in mid-2024.