In the most recent quarter, Q3'26, KLAC's ROE stands at 20.6%, reflecting a slight decline from the prior quarter's 21.0%, while ROA is at 7.1%, showing marginal improvement from 6.9% in Q2'26, and ROIC is at 9.1%, down from 10.7% in Q2'26. This indicates a mixed performance in the latest period, with ROA providing a modest positive signal amid broader softening in equity and invested capital efficiency. Over the period from Q4'23 to Q3'26, ROE has exhibited volatility with an overall upward trend, peaking at 27.2% in Q3'25 before retreating to current levels, highlighting periods of strong growth followed by corrections. ROA and ROIC have followed a similar pattern of initial fluctuations—dipping to lows around 4.0% and 7.0% in Q3'24—before steadily climbing to highs of 7.5% and 12.1% in Q4'25, respectively, though both have moderated recently, suggesting sustained but uneven improvements in asset utilization and capital returns.