In Q1'26, ASML's ROA reached 5.74%, marking a slight increase from 5.62% in Q4'25 and reflecting improved asset efficiency in the latest quarter. ROE stood at 13.23%, down marginally from 14.48% in the prior period, while ROIC was 9.49%, a decline from 11.78% in Q4'25, indicating varied profitability dynamics among the metrics. Over the period from Q2'23 to Q1'26, ASML's ROA exhibited a volatile yet overall upward trend, dipping to a low of 3.13% in Q1'24 before recovering steadily to 5.74%, with an average around 4.9% and notable gains in Q4'24 and Q4'25. ROE followed a similar pattern, starting at 18.31% in Q2'23, falling sharply to 8.87% in Q1'24, and fluctuating between 10-14% thereafter, averaging 13.2%. ROIC mirrored this trajectory, declining from 12.73% in Q2'23 to 6.51% in Q1'24 before rebounding to highs near 12.13% in Q4'24, though it ended lower at 9.49% in Q1'26, highlighting periodic challenges in capital returns amid semiconductor industry cycles. The line chart underscores a recovery phase post-Q1'24 across all indicators, with ROA showing the most consistent improvement, while ROE and ROIC display greater sensitivity to quarterly variances.