In Q1'26, ASML's operating expenses reached $1.48B, comprising $1.18B in R&D expenses and $302.3M in SG&A expenses, marking a slight decline from the Q4'25 peak of $1.64B ($1.26B R&D and $375.3M SG&A) but remaining elevated compared to earlier periods. Over the period from Q2'23 to Q1'26, total operating expenses exhibited an overall upward trend, growing from $1.28B to $1.48B, driven primarily by R&D expenses which increased steadily from $1B to $1.18B with notable accelerations in Q2'24 ($1.1B) and Q4'25 ($1.26B), while SG&A expenses fluctuated between $273.3M and $375.3M, showing volatility but contributing less to the total growth; this pattern suggests sustained investment in research amid stable administrative costs.